SEM/EDS/EBSD – Zeiss Merlin with AZtec EDS/EBSD
High resolution FEG SEM for surface imaging equipped with an EDS system for element analysis and EBSD system for crystal orientation mapping.
Schottky FEG, acceleration voltage 0.02 – 30kV.
Detectors for secondary and backscattered electron imaging.
5-axis (x, y, z, tilt and rotation) motorized stage.
Resolution 0.8nm @ 15kV and 1.4nm @ 1kV.
EDS: X-Max 80mm2 Silicon Drift Detector with high sensitivity and for analysis at high count rates.
AZtec (INCA energy) software for X-ray mapping and element analysis.
EBSD: Nordlys Max detector, AZtec HKL software.
The samples must be compatible with high vacuum. Outgassing samples must be pre-pumped in a separate pumping system.