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Evaporator - UMS (PT11)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Adam Hultqvist

2nd Responsible:

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Description

Separate tool owner - Restricted access - Contact tool responsible

Evaporation of NaF

Details

Tool name:

Evaporator - UMS

Area/room:

3R07 - FTE PV

Category:

Thin film deposition

Manufacturer:

Baltzers

Model:

UMS

Tool Modes

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