Picture of Wet Bench (KOH-IPA / HF / warm rinse)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Sven Norén
2nd Responsible:
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Description

Stangl (acid) KOH-IPA / HF / warm rinse Si etch

Details
Tool name:
Wet Bench (KOH-IPA / HF / warm rinse)
Area/room:
3R79 - våtkemi
Category:
Wet process & preparation
Manufacturer:
Stangl
Model:
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