Picture of Plasma Etcher
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Björn Kuzavas
2nd Responsible:
Files
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Description

Gaser - Media inkopplade till TorrEtsen PE-100
G1 - Oxygen.
G2 - Argon.
G3 - Trifluormethane CHF3.

G4 - GA010 Nitrogen N2B.
N2 - GA010 Nitrogen N2B.
Air - Tryckluft.
G5 - Not Conected.

Door O-Ring: 55.0" x .275 cs, sil 70 shore

Details
Tool name:
Plasma Etcher
Area/room:
3R44 - ets / tunnfilm
Category:
Dry etch
Manufacturer:
Plasma Etch
Model:
PE-100
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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