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Wet Bench - free acid / acid drain (KOH) (PC18)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Sven Norén

2nd Responsible:

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Description

Stangl (acid) KOH / free acid / acid drain Si etch

Details

Tool name:

Wet Bench - free acid / acid drain (KOH)

Area/room:

3R79 - våtkemi

Category:

Wet process & preparation

Manufacturer:

Stangl

Model:

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