Picture of Vertical Furnace (high temp anneal)
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
Örjan Vallin
2nd Responsible:
Files
You must be logged in to view files.
Description

anneal (max 1200 C) Tset + gasflow

Gases: N2 (GA012), O2 (GA051), Ar (GA021)

Details
Tool name:
Vertical Furnace (high temp anneal)
Area/room:
3R76o - diffusion (HT-proc)
Category:
Thermal process
Manufacturer:
Koyo Lindberg
Model:
Micro TF-6
Process info

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.