Picture of Pattern Generator
Current status:
WARNING
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

The Heidelberg Instruments DWL 200 is a large area, high-resolution imaging system to expose on metalized plates with a photoresist cover, using HeCd laser system.

 

Tool name:
Pattern Generator
Area/room:
3R84n - maskgenerering
Category:
Lithography
Manufacturer:
Heidelberg
Model:
DWL 200

Instructors

Licensed Users

You must be logged in to view tool modes.