Zeiss LEO 1550 with Oxford AZtec EDS

High resolution FEG SEM for surface imaging equipped with an EDS system for element analysis. Equipped with InLens, SEII, and BSD detectors.

• Schottky FEG with high current mode,
• Acceleration voltage range: 0.2 – 30 kV, Beam deceleration providing excellent low kV imaging
• Resolution: 1nm at 20kV, 3nm at 1kV
• Magnification: 20-900000x
• EDS:
  • 80mm² Silicon Drift Detector with high sensitivity and for analysis at high count rates
  • 6.5 mm analytical working distance
  • Oxford AZtec (INCA energy) software for X-ray mapping and element analysis
• 5-axis motorized stage (x, y, z, tilt and rotation)
• InLens SE detector
• Everhar-Thornley SE/BSE detector
• Four-Quadrant BSE detector

The samples must be compatible with high vacuum.

Outgassing samples must be pre-pumped in a separate pumping system.

Powder samples must me prepared with care to avoid contamination of the gun column.