PSIA XE150 SPM/AFM
The AFM uses a cantilever with a sharp tip (probe) at its end to scan a sample surface. Data obtained depends on the mode used.
Atomic Resolution
Non-Contact AFM (NC-AFM)
Contact AFM (C-AFM)
Dynamic Force Microscopy (DFM) - Hybrid of C-AFM / NC-AFM
Lateral Force Microscopy (LFM)
Electrostatic Force Microscopy (EFM)
PSIA XEP (data collection), XEI (image processing), XEC (camera only) software
XY and Z scanners separated
Max XY-scan area: 100x100 um
Max Z-scan range: 12 um
Motorized stage accomodates small specimen up to 4” wafer
Vaccum and magnetic sample attachment options
CCD Camera
Optical 10X objective lens yields about 500x magnification
Enhanced Acoustic Enclosure & Active Vibration Isolation System