Basic information / Capabilities
The AFM uses a cantilever with a sharp tip (probe) at its end to scan a sample surface. Data obtained depends on the mode used.
Technical information
Resolution at atmoic scale.
Non-Contact AFM (NC-AFM) and Contact AFM (C-AFM).
Dynamic Force Microscopy (DFM) - Hybrid of C-AFM / NC-AFM.
Lateral Force Microscopy (LFM).
Electrostatic Force Microscopy (EFM).
PSIA XEP (data collection), XEI (image processing), XEC (camera only) software.
XY and Z scanners separated.
Vaccum and magnetic sample attachment options.
CCD Camera.
Performance
Max XY-scan area: 100x100 um.
Max Z-scan range: 12 um.
Motorized stage accomodates small specimen up to 4” wafer.
Optical 10X objective lens yields about 500x magnification.
Enhanced Acoustic Enclosure & Active Vibration Isolation System.
Restrictions