Picture of CIGS evaporator - M. Pilote
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This system is dedicated for evaporation of copper, indium, gallium and selenium. Aluminium must not be introduced.

In-line evaporation with substrate heating. Thermal evaporation from sources with very accurate temperature control. Capacity 24 substrates/hour. Substrate size 12.5x12.5 cm2.

Tool name:
CIGS evaporator - M. Pilote
Area/room:
3R09 - FTE PV
Category:
Thin film deposition
Manufacturer:
Von Ardenne
Model:
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Max booking time, night:
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