Picture of ESEM / (EBL)
Current status:
DOWN
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Responsibles
1st Responsible:
Fredric Ericson
2nd Responsible:
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Description

ESEM, e-beam lithography

Details
Tool name:
ESEM / (EBL)
Area/room:
3R60 - SEM / FIB
Category:
Scanning electron Microscopy (SEM)
Manufacturer:
FEI
Model:
XL30 ESEM
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Tool Modes
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