WYKO NT1100

Optical phase-shifting and white light vertical scanning interferometry for three-dimensional, non-contact, surface profile measurements

Objectives:  2.5X, 10X, 50X; manual turret
Field-of-View Lenses: 0.5X, 1.0X, 2.0X
Wyko Vision32 ® software

Vertical Measurement Range: 0.1 nm to 1 mm
Vertical Resolution:  < 1Å Ra
Vertical Scan Speed: up to 7.2 µm/sec
Lateral Spatial Sampling:  0.08 to 13.1 µm
Field-of-View:  8.24 mm to 0.05 mm (larger areas with Data Stitching option)

Vibration isolation table